Accelerometer
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What is the definition of accelerometer?
A device used to detect and measure linear acceleration along an axis. MEMS is a common accelerometer technology.
Image depicts the operation of a simple MEMS accelerometer.
- The anchors (A) hold the proof mass (B) in position.
- The proof mass consists of a centre section (i), with several protruding fingers (ii).
- The sections of the proof mass between the centre section and anchors act as the springs (iii).
- The fixed electrodes (C) make up the differential capacitors, with a protruding finger from the proof mass between the capacitor electrodes.
When the accelerometer is at rest or is traveling at a fixed velocity (zero acceleration), the fingers are in the centre position between the electrodes, as shown.